INTEGRATED PIEZOELECTRIC CANTILEVER ACTUATOR AND TRANSISTOR FOR TOUCH INPUT AND HAPTIC FEEDBACK APPLICATIONS

摘要

User feedback may be generated and user input received through a single semiconductor component integrated into the electronic device. The single semiconductor component may include a piezoelectric cantilever actuator integrated with a transistor, such as a thin-film transistor, such that the actuator is electrically isolated from the transistor but mechanically attached to the transistor. One manner of integration is to extend a piezoelectric thin film of the actuator into a gate electrode stack of the transistor. The cantilever actuator may be controlled to provide haptic feedback. Separate from, and possibly simultaneously with the control of the cantilever actuator, user input may be received through the transistor integrated with the cantilever actuator.