| 摘要 |
PROBLEM TO BE SOLVED: To abate a thermal energy loss by efficiently recovering heat generated within a reaction furnace and effectively utilizing the same for manufacturing trichlorosilane and to absorb volume variations due to expansion/contraction of a heat medium accompanying the start and stoppage of the reaction furnace.SOLUTION: The provided apparatus includes a plurality of reaction furnaces 2A through 2D in which a metallic silicon powder is reacted while being fluidized by a hydrogen chloride gas and a distillation column 3 for distilling trichlorosilane-containing chlorosilanes generated by this reaction in a state where a steam generator 8 for generating steam by heating water with a heat medium having come to abide a high temperature is connected to a heat medium distribution tube 6 through which the heat medium having passed through the reaction furnace interiors is circulated and distributed, where a steam transport tube 26 using the steam as a heat source for the distillation column 3 is connected to the steam generator, where a flow channel control means for controlling the distribution of the heat medium between each reaction furnace and the steam generator is provided on the heat medium distribution tube, and where an expansion tank 38 for mitigating the pressure variation within any of the heat medium distribution tubes is provided between the respective heat medium distribution tubes of at least two reaction furnaces selected among all reaction furnaces. |
