发明名称 ダイヤモンドラッピング用樹脂定盤及びそれを用いたラッピング方法
摘要 PROBLEM TO BE SOLVED: To provide a stool for diamond wrapping capable of reducing thickness of a work-affected layer of an object to be ground and suppressing roll-off.SOLUTION: The resin stool for diamond wrapping comprises resin sheet having thermosetting polyurethane resin and void of 0 to 20%, and shore D hardness of equal to or more than 50°. By using the resin stool for diamond wrapping, diamond abrasive grain is buried to a grinding surface easily and extreme projection of a part of the abrasive grain is suppressed so a thickness of an affected layer is suppressed. And because of high hardness, roll-off is also suppressed.
申请公布号 JP6093170(B2) 申请公布日期 2017.03.08
申请号 JP20120277420 申请日期 2012.12.19
申请人 富士紡ホールディングス株式会社 发明人 川村 佳秀;高橋 大介;糸山 光紀
分类号 B24B37/14;B24B37/12;C08G18/10;C08G18/32;H01L21/304 主分类号 B24B37/14
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