发明名称 |
化学蒸着法によるSi基板上へのニッケル薄膜、及び、Si基板上へのNiシリサイド薄膜の製造方法 |
摘要 |
PROBLEM TO BE SOLVED: To provide a method for directly forming a Ni thin film on a Si substrate without remaining impurities in the formed Ni thin film, and a method for manufacturing a NiSi film obtained by properly siliciding the Ni thin film.SOLUTION: The method for manufacturing a nickel thin film uses: a Si substrate having any of B, P or As doped on the surface as a substrate; a nickel complex having a cyclopentadienyl group (Cp) or its derivative and chain or cyclic alkenyl group consisting of 3-9 carbon atoms or its derivative coordinated in nickel being a hydrocarbon nickel complex without including any elements except carbon and hydrogen in the structure as a raw material compound: hydrogen as reactive gas; and a deposition pressure of 1-150 torr and a deposition temperature of 80-250°C as deposition conditions. |
申请公布号 |
JP6091023(B2) |
申请公布日期 |
2017.03.08 |
申请号 |
JP20150127262 |
申请日期 |
2015.06.25 |
申请人 |
田中貴金属工業株式会社 |
发明人 |
鍋谷 俊一;原田 了輔;鈴木 和治;曽根 孝之;横尾 道弘 |
分类号 |
C23C16/18;H01L21/28;H01L21/285 |
主分类号 |
C23C16/18 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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