发明名称 メモリセル構造
摘要 The present disclosure includes memory cell structures and method of forming the same. One such method includes forming a memory cell includes forming, in a first direction, a select device stack including a select device formed between a first electrode and a second electrode; forming, in a second direction, a plurality of sacrificial material lines over the select device stack to form a via; forming a programmable material stack within the via; and removing the plurality of sacrificial material lines and etching through a portion of the select device stack to isolate the select device.
申请公布号 JP6092431(B2) 申请公布日期 2017.03.08
申请号 JP20150559324 申请日期 2014.05.08
申请人 マイクロン テクノロジー, インク. 发明人 シルス,スコット イー.;ラマスワミ,ドゥライ ヴィシャーク ニルマル
分类号 H01L27/105;H01L21/8246;H01L45/00;H01L49/00 主分类号 H01L27/105
代理机构 代理人
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