レーザー光をフォーカシングするためのビーム整形ユニット、および、ビーム整形ユニットの駆動方法

摘要

A beam shaping unit for focusing a divergent laser beam includes a first optical element to receive the laser beam, a second optical element to receive the beam from the first optical element, an optical focusing unit to receive the beam from the second optical element, a first focal point adjustment device coupled to the first optical element, the first focal point adjustment device being configured to adjust the beam focal point diameter by manipulating the first optical element, and a second focal point adjustment device coupled to the second optical element, the second focal point adjustment device being configured to adjust, in the beam propagation direction, the beam focal position by manipulating the second optical element, and in which the beam shaping unit is configured to image the beam from the first optical element through an intermediate focal point onto the second optical element.