发明名称 分割方法及び分割装置
摘要 PROBLEM TO BE SOLVED: To provide dividing method and a dividing apparatus with which an object can hardly get an oblique crack.SOLUTION: A dividing method comprises: a sheet fixing step in which a division starting point (21) is formed along a predetermined division line (17), and in which a sheet (23), where a circular plate object (11) is adhered, is fixed at its outer peripheral part; a positioning step in which an extending direction of a division bar (20) is positioned in parallel with an extending direction of the predetermined division line of the circular plate object, and in which the division bar is positioned at the center of the circular plate object; a first division step in which, while sucking the circular plate object through the sheet, the division bar is moved from the center of the circular plate object toward one end (E1) of an outer rim in a direction of orthogonal to the extending direction of the predetermined division line; and a second division step in which, while sucking the circular plate object through the sheet, the division bar is moved from the center of the circular plate object toward the other end (E2) of the outer rim.
申请公布号 JP6091335(B2) 申请公布日期 2017.03.08
申请号 JP20130111872 申请日期 2013.05.28
申请人 株式会社ディスコ 发明人 高澤 徹
分类号 H01L21/301;B28D5/00 主分类号 H01L21/301
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