| 摘要 |
There is provided a method for controlling a shape measuring apparatus (100) which continues to perform nominal scanning measurement to a workpiece having a slightly large deviation from a design data. A scanning path to move a stylus tip (232) is calculated based on design data of a workpiece. The stylus tip (232) is moved along the scanning path. It is monitored whether a distance between the scanning path and an actual workpiece is excessive. When the distance between the scanning path and the actual workpiece is excessive, a trajectory difference error is generated. When the trajectory difference error is generated, geometric correction is performed to the design data so that the design data approaches to the actual workpiece. Scanning measurement is performed based on the design data after the geometric correction. |
