Resonant MEMS lorentz-force magnetometer using force-feedback and frequency-locked coil excitation

摘要

A method includes supplying a current to at least one conductive path integral with a MEMS device to thereby exert a Lorentz force on the MEMS device in the presence of a magnetic field. The method includes determining the magnetic field based on a control value in a control loop configured to maintain a constrained range of motion of the MEMS device. The control loop may be configured to maintain the MEMS device in a stationary position. The current may have a frequency equal to a resonant frequency of the MEMS device.

主权项

1. A method comprising:
supplying a current to at least one conductive path integral with a proof mass of a microelectromechanical system (MEMS) device to thereby exert a Lorentz force on the MEMS device in the presence of a magnetic field; and determining the magnetic field based on a control value in a control loop configured to apply a feedback force to the proof mass that opposes the Lorentz force to compensate for a displacement of the proof mass from a nominally stationary position.