Electronic device handling apparatus and electronic device testing apparatus

摘要

Provided is an electronic device handling apparatus capable of increasing the number of simultaneous measurements while suppressing the increase in cost. An electronic device handling apparatus, which moves bare dies relative to a probe card, includes: a thermal head which includes a plurality of holding regions each of which holds the bare die and has openings; at least one lift unit which is movably held by the thermal head so as to correspond to the holding regions and is able to advance and retreat through the openings; a moving device which moves the thermal head; and a fixed arm which is able to support the one lift unit.

主权项

1. An electronic device handling apparatus which moves electronic devices under test relative to a contact unit, comprising:
a holding member which includes at least one holding region which holds the electronic device under test, the at least one holding region having at least one opening; at least one position adjusting member which is movably held by the holding member so as to correspond to the holding region; a first moving unit which moves the holding member; and a supporting member which is able to support the at least one one position adjusting member, wherein: the holding member includes:
a storage space in which the at least one position adjusting member is stored; andat least one through-hole through which the opening and the storage space communicate with each other, the storage space includes a window portion through which the supporting member is able to enter the storage space to support the at least one position adjusting member, the at least one position adjusting member includes:
at least one pin which includes an end portion which is able to advance and retreat through the opening,a block on which the pin is standingly provided,the pin is inserted into the through-hole; andthe block is stored in the storage space, when the supporting member supports the at least one position adjusting member, the end portion of the at least one position adjusting member protrudes to an outside of the holding member through the opening, and when the supporting member is separate from the at least one position adjusting member, the end portion of the at least one position adjusting member retracts to an inside of the holding member through the opening.