发明名称 Boresight error monitor for laser radar integrated optical assembly
摘要 Boresight and other pointing errors are detected based on a monitor beam formed by diverting a portion of a probe beam. The monitor beam is directed to a position sensitive photodetector, and the optical power received at the position sensitive photodetector is used to estimate or correct such pointing errors.
申请公布号 US9587977(B2) 申请公布日期 2017.03.07
申请号 US201314010375 申请日期 2013.08.26
申请人 Nikon Corporation 发明人 Smith Daniel G.;Novak W. Thomas
分类号 G01J1/00;G01S7/497;G01S7/481 主分类号 G01J1/00
代理机构 Klarquist Sparkman, LLP 代理人 Klarquist Sparkman, LLP
主权项 1. An optical measurement system for determining a target dimension, comprising: a measurement beam source configured to produce a measurement beam; a measurement beam optical system configured to direct the measurement beam at a target, the measurement beam optical system including a moveable focus element for focusing the measurement beam at the target; a beam splitter configured to select a portion of the measurement beam after propagating through the movable focus element so as to form a monitor beam; a monitor beam photodetection system configured to receive the monitor beam and provide an indication of a measurement beam pointing error that is associated with the movement of the moveable focus element; and a measurement beam photodetection system configured to estimate the target dimension and a coordinate associated with a target location of the target based on a portion of the measurement beam returned from the target, wherein at least one of the estimated coordinate or the target location is adjusted based on the indicated pointing error.
地址 Tokyo JP