发明名称 |
Boresight error monitor for laser radar integrated optical assembly |
摘要 |
Boresight and other pointing errors are detected based on a monitor beam formed by diverting a portion of a probe beam. The monitor beam is directed to a position sensitive photodetector, and the optical power received at the position sensitive photodetector is used to estimate or correct such pointing errors. |
申请公布号 |
US9587977(B2) |
申请公布日期 |
2017.03.07 |
申请号 |
US201314010375 |
申请日期 |
2013.08.26 |
申请人 |
Nikon Corporation |
发明人 |
Smith Daniel G.;Novak W. Thomas |
分类号 |
G01J1/00;G01S7/497;G01S7/481 |
主分类号 |
G01J1/00 |
代理机构 |
Klarquist Sparkman, LLP |
代理人 |
Klarquist Sparkman, LLP |
主权项 |
1. An optical measurement system for determining a target dimension, comprising:
a measurement beam source configured to produce a measurement beam; a measurement beam optical system configured to direct the measurement beam at a target, the measurement beam optical system including a moveable focus element for focusing the measurement beam at the target; a beam splitter configured to select a portion of the measurement beam after propagating through the movable focus element so as to form a monitor beam; a monitor beam photodetection system configured to receive the monitor beam and provide an indication of a measurement beam pointing error that is associated with the movement of the moveable focus element; and a measurement beam photodetection system configured to estimate the target dimension and a coordinate associated with a target location of the target based on a portion of the measurement beam returned from the target, wherein at least one of the estimated coordinate or the target location is adjusted based on the indicated pointing error. |
地址 |
Tokyo JP |