Substrate processing apparatus, method of manufacturing semiconductor device and non-transitory computer-readable recording medium

摘要

Provided is a substrate processing apparatus including a substrate processing chamber configured to process a substrate; a gas supply unit configured to alternately supply a first processing gas and a second processing gas to the substrate when processing the substrate; a substrate support unit including a support mechanism configured to support a portion of a back side of the substrate and a support unit configured to support the support mechanism; a heating unit configured to heat the substrate from the back side thereof; a standby chamber configured to accommodate the substrate support unit in standby position; and a control unit configured to control at least one of the gas supply unit and a gas exhaust unit in a manner that an inner pressure of the substrate processing chamber is higher than that of the standby chamber.

主权项

1. A method of manufacturing a semiconductor device, comprising:
(a) transferring a substrate from a standby chamber to a substrate processing position in a substrate processing chamber by a substrate support unit; (b) supplying an inert gas into the substrate processing chamber with the substrate in the substrate processing position such that an inner pressure of the substrate processing chamber is higher than that of the standby chamber; (c) alternately supplying a first processing gas and a second processing gas to the substrate while heating the substrate from a back side thereof after performing (b); and (d) starting a supply of the inert gas into the standby chamber after a supply of the second processing gas starts and stopping the supply of the inert gas into the standby chamber before the supply of the second processing gas stops.