Fast programming antifuse and method of manufacture

摘要

The embodiments described herein provide an antifuse that includes a substrate material and an isolation trench formed in the substrate material, where the isolation trench has a first side and a second side opposite the first side. An electrode is positioned above the substrate material and proximate to the first side of the isolation trench. An insulating layer is disposed between the electrode and the substrate material. So configured, a voltage or current applied between the electrode and the substrate material causes a rupture in the insulating layer and creates a current path through the insulating layer and under the isolation trench to the substrate material proximate the second side of the isolation trench.

主权项

1. An antifuse element comprising:
a substrate material; an isolation trench formed in the substrate material, the isolation trench having a first side and a second side opposite the first side; an electrode positioned above the substrate material and having at least a portion proximate to the first side of the isolation trench; and an insulating layer disposed between the electrode and the substrate material such that voltage of a threshold applied between the electrode and the substrate material causes a rupture in the insulating layer and creates a current path from the electrode through the insulating layer and under the isolation trench to the substrate material proximate the second side of the isolation trench; a first contact electrically coupled to the electrode and a second contact electrically coupled to the substrate material proximate the second side of the isolation trench, and wherein the current path is created between the first contact and the second contact.