Deposition apparatus, method for forming thin film using the same, organic light emitting display apparatus and method for manufacturing the same

摘要

A deposition apparatus is configured to form a deposition layer on a substrate. The deposition apparatus includes a deposition source configured to face a first side of the substrate and to spray one or more depositing materials toward the substrate, a cooling stage configured to support a second side of the substrate that is opposite from the first side of the substrate, and a hardening unit configured to harden the one or more depositing materials sprayed from the deposition source and that have reached the substrate. A method of forming a thin film deposition layer on a substrate by using a deposition apparatus is also provided. The method includes spraying one or more depositing materials toward the substrate by using a deposition source of the deposition apparatus while the substrate is on a cooling stage of the deposition apparatus.

主权项

1. A deposition apparatus configured to form a deposition layer on a substrate, the deposition apparatus comprising:
a deposition source configured to face a first side of the substrate and to spray one or more depositing materials toward the substrate; a cooling stage configured to support a second side of the substrate that is opposite from the first side of the substrate; and a hardening unit configured to harden the one or more depositing materials sprayed from the deposition source and that have reached the substrate.