发明名称 Display apparatus including a thin film encapsulation layer and apparatus for and method of manufacturing the display apparatus
摘要 A display apparatus and an apparatus for and method of manufacturing the display apparatus. The display apparatus includes: a substrate; a display unit formed on the substrate; and a thin film encapsulation layer formed on the display unit. The thin film encapsulation layer includes an inorganic layer, and the inorganic layer includes a first sub-inorganic layer including a compound oxide including at least two of aluminum (Al), zinc (Zn), zirconium (Zn), and hafnium (Hf).
申请公布号 US9587311(B2) 申请公布日期 2017.03.07
申请号 US201514819381 申请日期 2015.08.05
申请人 Samsung Display Co., Ltd.;Research & Business Foundation Sungkyunkwan University 发明人 Huh Myungsoo;Cho Sungmin;Ko Dongkyun;Kim Sungchul;Kim Inkyo;Roh Cheollae;Seo Sangjoon;Seo Seungwoo;Jang Choelmin
分类号 H01L27/15;H01L31/12;H01L33/00;C23C16/455;H01L51/52;H01L51/56 主分类号 H01L27/15
代理机构 Lewis Roca Rothgerber Christie LLP 代理人 Lewis Roca Rothgerber Christie LLP
主权项 1. A display apparatus, comprising: a substrate; a display unit on the substrate; and a thin film encapsulation layer on the display unit, wherein the thin film encapsulation layer comprises an inorganic layer, and the inorganic layer comprises a first sub-inorganic layer comprising a compound oxide comprising at least two of aluminum (Al), zinc (Zn), zirconium (Zn), and hafnium (Hf).
地址 Yongin-si KR