Reflective optical element for a dynamic deflection of a laser beam and method for manufacture thereof

摘要

The invention relates to reflective optical elements for a dynamic deflection of a laser beam and to a manufacturing method for these reflective elements. It is the object of the invention to provide reflective optical elements for a dynamic deflection of laser beams which can be manufactured less expensively and which are flexible in their geometrical design so that they achieve improved properties in dynamic operation. In the reflective optical element in accordance with the invention, a surface of a base body and a plate-shaped reflective element are connected to one another in a planar manner and with material continuity by means of a solder connection.

主权项

1. A method of manufacturing a reflective optical element, for a dynamic deflection of a laser beam, said reflective optical element including a base body and a plate-shaped reflective element, characterized in that reactive nanometer layers and at least one solder layer are formed or arranged between a respective surface of the base body and a respective surface of the base body and a surface of the plate-shaped reflective element;
in that the base body and the plate-shaped reflective element are pressed together by a pressure application with the reactive nanometer multilayers arranged or present therebetween, with a pressure in the range of 0.5 MPa to 15 MPa being observed; and in that the reactive nanometer multilayers are activated by an energy input which will be achieved by an electric ignition or by a laser beam so that the solder is melted and the connection of the base body to the plate-shaped reflective element with material continuity after the solidifying of the solder is established by the released heat.