Semiconductor device inspection device and semiconductor device inspection method

摘要

A semiconductor device inspection system (1) includes a laser beam source (2), for emitting light, an optical sensor (12) for detecting the light reflected by the semiconductor device (10) from the light and outputting a detection signal, a frequency band setting unit (16) for setting a measurement frequency band and a reference frequency band with respect to the detection signal, a spectrum analyzer (15) for generating a measurement signal and a reference signal from the detection signals in the measurement frequency band and the reference frequency band, and a signal acquisition unit (17) for calculating a difference between the measurement signal and the reference signal to acquire an analysis signal. The frequency band setting unit (16) sets the reference frequency band to a frequency domain in which a level of the detection signal is lower than a level obtained by adding 3 decibels to a white noise level serving as a reference.

主权项

1. A system for inspecting a semiconductor device serving as a device under test, the system comprising:
a light source configured to generate light to be irradiated the semiconductor device; a light detector configured to detect reflected light that is reflected from the semiconductor device and output a detection signal; a frequency band setting unit configured to set a measurement frequency band and a reference frequency band with respect to the detection signal; a signal generating unit electrically coupling the frequency band setting unit and configured to generate a measurement signal from the detection signal in the measurement frequency band and generate a reference signal from the detection signal in the reference frequency band; and a signal acquisition unit electrically coupling the signal generating unit and configured to calculate a difference between the measurement signal and the reference signal to acquire an analysis signal, wherein, when a level of the detection signal is calculated based on power, the frequency band setting unit sets the reference frequency band to a frequency domain in which the level is lower than a level obtained by adding 3 decibels to a white noise level serving as a reference.