Methods and apparatus for nanofabrication using a pliable membrane mask

摘要

Apparatus for nanofabrication on an unconventional substrate including a patterned pliable membrane mechanically coupled to a membrane support structure, a substrate support structure to receive a substrate for processing, and an actuator to adjust the distance between the pliable membrane and the substrate. Nanofabrication on conventional and unconventional substrates can be achieved by transferring a pre-formed patterned pliable membrane onto the substrate using a transfer probe or non-stick sheet, followed by irradiating the substrate through the patterned pliable membrane so as to transfer the pattern on the pliable membrane into or out of the substrate. The apparatus and methods allow fabrication of diamond photonic crystals, fiber-integrated photonic devices and Nitrogen Vacancy (NV) centers in diamonds.

主权项

1. A nanofabrication apparatus comprising:
a pliable membrane having an edge, a first surface, a second surface, and a thickness of about 100 nm to about 1 μm, the pliable membrane being patterned to selectively transmit radiation incident on the first surface; a membrane support structure, mechanically coupled to the edge of the pliable membrane via at least one anchor point, to hold the pliable membrane; a substrate support structure, disposed opposite the second surface of the pliable membrane, to receive a substrate; and an actuator, operably coupled to at least one of the membrane support structure or the substrate support structure, to position the membrane support structure relative to the substrate support structure, wherein the membrane support structure defines a cavity to hold a liquid to float the pliable membrane.