Non-destructive inspection system for display panel and method, and non-destructive inspection apparatus thereof

摘要

A non-destructive inspection apparatus includes a light source generating light, an optical coupler which divides the light, irradiates the divided light to a reference part and a sample part, generates coherent light, and transmits the coherent light to a detecting part, the reference part which phase-scans the irradiated light and reflects the light, the sample part which irradiates the light incident from the optical coupler to a display panel, and scans and reflects the light reflected from the display panel, the detecting part which obtains an image signal of the display panel from the coherent light, a transferring part which moves a position of the sample part, and the control part which generates an image of the display panel based on the image signal of the display panel transmitted from the detecting part and detects a foreign substance, and controls movement of the transferring part.

主权项

1. A non-destructive inspection apparatus comprising:
a light source generating light; an optical coupler which divides the generated light, irradiates the divided light to a reference part and a sample part, generates coherent light by combining light reflected and incident from the reference part and the sample part, and transmits the coherent light to a detecting part; the reference part which phase-scans the light incident from the optical coupler and includes a reference mirror to reflect the light; the sample part which irradiates the light incident from the optical coupler to a display panel, and includes a scanner to scan and reflect the light reflected from the display panel; the detecting part including a spectrometer to obtain an image signal of the display panel from the coherent light incident from the optical coupler; a transferring device which moves a position of the sample part up and down according to the scanning of the light reflected from the display panel by the sample part so that the display panel is located at a predetermined scan area, thereby enabling automatic focusing on the display panel to be inspected; and a controller comprising at least one processor configured to:
generate a one-dimensional cross-sectional display panel image, a two-dimensional tomographic display panel image, and a three-dimensional display panel image based on the image signal transmitted from the detecting part, and identify existence of a foreign substance based on a refractive index according to each material appearing on the one-dimensional cross-sectional display panel image,generate an image of the display panel based on the image signal of the display panel transmitted from the detecting part and detect a foreign substance, andcontrol movement of the transferring device according to the scanning of the light reflected from the display panel by the sample part.