EDDY CURRENT SENSOR

摘要

An eddy current sensor 1-50 arranged in the vicinity of a substrate includes a core part 1-60 and a coil part 1-61. The core part 1-60 includes a common part 1-65, and four cantilever parts 1-66 to 69 connected to the common part 1-65. Ends of a first cantilever part 1-66 and a second cantilever part 1-67 are close and adjacent to each other. Ends of a third cantilever part 1-69 and a fourth cantilever part 1-68 are close and adjacent to each other. At the common part 1-65, an excitation coil is arranged. A first detection coil 1-631 is arranged at the first cantilever part 1-66 and a second detection coil 1-632 is arranged at the second cantilever part 1-67. A first dummy coil 1-642 is arranged at the third cantilever part 1-69, and a second dummy coil 1-641 is arranged at the fourth cantilever part 1-68.

主权项

1. An eddy current sensor arranged in a vicinity of a substrate where a conductive film is formed, the eddy current sensor comprising:
a core part and a coil part, wherein the core part includes a common part and four cantilever parts connected to an end of the common part, a first cantilever part and a second cantilever part are arranged on an opposite side of a third cantilever part and a fourth cantilever part with respect to the common part, wherein the first cantilever part and the third cantilever part are arranged at one end of the common part, and the second cantilever part and the fourth cantilever part are arranged at the other end of the common part, wherein the coil part includes: an excitation coil that is arranged in the common part and is capable of forming an eddy current at the conductive film; a detection coil that is arranged in at least one of the first cantilever part and the second cantilever part, and is capable of detecting the eddy current formed at the conductive film; and a dummy coil that is arranged in at least one of the third cantilever part and the fourth cantilever part, wherein ends of the first cantilever part and the second cantilever part far from parts where the first cantilever part and the second cantilever part are connected with the common part are close and adjacent to each other, and wherein ends of the third cantilever part and the fourth cantilever part far from parts where the third cantilever part and the fourth cantilever part are connected with the common part are close and adjacent to each other.