发明名称 OPTICAL STATION FOR EXCHANGING OPTICAL ELEMENTS
摘要 An optical station for a laser processing device including a plurality of holders for holding respective optical elements; a rotatable magazine having a plurality of accommodation spaces for accommodating the plurality of holders; a positioning device having a holder clamp for clamping and positioning a selected one of the optical elements. a magazine actuator for rotating the magazine; linear shifting means for shifting the magazine in a direction parallel to the optical axis, wherein the magazine is shifted towards the positioning device such that the positioning device lifts the holder from its accommodation space.
申请公布号 US2017062247(A1) 申请公布日期 2017.03.02
申请号 US201615248282 申请日期 2016.08.26
申请人 ASM Technology Singapore Pte Ltd 发明人 VIANEN Job;NOIJEN Ralf Petrus Francis;VAN OOIK Gerrit Arie;VAN DER DOES Marius
分类号 H01L21/67;B23K26/364;B23K26/402;B23K26/064 主分类号 H01L21/67
代理机构 代理人
主权项 1. Optical station for a laser processing device having an optical path, the optical station having a positioning axis that is intended to coincide with the optical path of the laser processing device, the optical station comprising: a plurality of holders for holding respective optical elements; a positioning device having a holder clamp for clamping and positioning a selected one of the holders such as to position the corresponding optical element in the optical path; a magazine having a plurality of accommodation spaces for accommodating the plurality of holders, wherein the magazine is configured to be displaceable in a virtual XY-plane perpendicular to the positioning axis, and wherein the magazine and the holder clamp are configured to be displaceable with respect to each other in a Z-direction parallel to the positioning axis; a magazine XY-actuator for displacing the magazine perpendicular to the positioning axis with respect to the positioning device; a magazine Z-actuator for effecting a relative Z-displacement of the magazine and the holder clamp with respect to each other, between a relative distal extreme position and a relative proximal extreme position; wherein, when the magazine and the holder clamp are in the relative distal extreme position, the magazine is operative to lift a holder from the holder clamp and is displaceable in the XY-direction to select another holder; and wherein, when the magazine and the holder clamp are in the relative proximal extreme position, the holder clamp is operative to lift the selected holder from the magazine for accurately positioning the selected holder with respect to the positioning axis.
地址 Singapore SG