SAMPLE HOLDER AND SAMPLE HOLDER SET

摘要

Disclosed herein is a sample holder which holds a sample such that a surface is exposed and can be mounted in each of multiple measurement devices that perform measurement based on different measurement principles so that properties of the sample can be measured by each of the measurement devices. The sample holder includes: a main body that surrounds the sample; alignment marks that are arranged at each of two or more different positions in a surface of the main body and can be detected by the measurement devices; and a sample-retaining portion that is disposed within the main body and retains the sample such that a height difference between a mark surface of the alignment mark and the surface of the sample is set to a predetermined value.

主权项

1. A sample holder which holds a sample such that a surface of the sample is exposed and, can be mounted in each of multiple measurement devices that perform measurement based on different measurement principles respectively so that properties of the sample can be measured by each of the measurement devices, the sample holder comprising:
a main body that surrounds the sample; alignment marks that are arranged at each of two or more different positions on a surface of the main body and can be detected by the measurement devices; and a sample-retaining portion that is disposed within the main body and retains the sample such that a height difference between a mark surface of the alignment mark and the surface of the sample is set to a predetermined value.