| 发明名称 |
EUV LIGHT GENERATOR INCLUDING COLLECTING MIRROR HAVING DRIP HOLE |
| 摘要 |
An extreme ultraviolet (EUV) light generator includes a collecting mirror having a first focal point and a second focal point, the first focal point being closer to the collecting mirror than the second focal point, a laser to generate a laser beam and to radiate the laser beam toward the first focal point of the collecting mirror, and a droplet generator to generate a droplet and to discharge the droplet at the first focal point of the collecting mirror, wherein the collecting mirror includes a concave reflective surface, a through hole in a center of the reflective surface, and a drip hole between the through hole and an outer circumferential surface of the reflective surface. |
| 申请公布号 |
US2017059837(A1) |
申请公布日期 |
2017.03.02 |
| 申请号 |
US201615172390 |
申请日期 |
2016.06.03 |
| 申请人 |
SAMSUNG ELECTRONICS CO., LTD. |
发明人 |
KIM Hoyeon;KIM Seongsue |
| 分类号 |
G02B19/00;G21K1/06;G03F7/20;H05G2/00 |
主分类号 |
G02B19/00 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. An extreme ultraviolet (EUV) light generator, comprising:
a collecting mirror having a first focal point and a second focal point, the first focal point being closer to the collecting mirror than the second focal point; a laser to generate a laser beam and to radiate the laser beam toward the first focal point of the collecting mirror; and a droplet generator to generate a droplet and to discharge the droplet at the first focal point of the collecting minor, wherein the collecting mirror includes:
a concave reflective surface,a through hole in a center of the reflective surface, anda drip hole between the through hole and an outer circumferential surface of the reflective surface. |
| 地址 |
Suwon-si KR |
