| 摘要 |
The invention relates to a MEMS sound transducer, in particular MEMS loudspeaker and/or MEMS microphone, for generating and/or detecting sound waves in the audible wavelength spectrum, comprising a carrier element (9), a membrane (2) which can be deflected with respect to the carrier element (9) along a z-axis, at least one piezoelectric actuator (7) supported on the carrier element (9) for deflecting the membrane (2), and an electronic control unit (11) for activating the actuator (7). According to the invention, the MEMS sound transducer has at least one position sensor (19), by means of which a sensor signal (37) dependent on the membrane deflection is made available to the control unit (11). In addition, the control unit (11) is designed such that the sensor signal (37) can be analysed for functional self-testing, for distortion reduction, for damage protection and/or compensating behavioural changes and/or can be compared with a reference signal (8) stored in the control unit (11), and such that the actuator (7) can be activated in a controlled manner by considering the analysis result (35) and/or comparison result (34). |
