发明名称 MANUFACTURING METHOD FOR MAGNETIC MASK PLATE FOR EVAPORATION
摘要 A manufacturing method for a magnetic mask plate for evaporation. The method comprises: S1: manufacturing a metal supporting layer; S2: covering the surface of the metal supporting layer with a film; S3: performing exposure on a photoresist film layer; and S4: performing developing on the photoresist film layer. According to the magnetic mask plate manufactured by using the method, an organic mask layer forming the mask plate can be made to be very thin, further, the width of an opening is made to be smaller, so that the final magnetic mask plate can be used for evaporating, to form OLED products with higher resolution.
申请公布号 WO2017032247(A1) 申请公布日期 2017.03.02
申请号 WO2016CN95610 申请日期 2016.08.17
申请人 KUN SHAN POWER STENCIL CO., LTD. 发明人 WEI, Zhiling;ZHAO, Lujun;WEI, Zhihao;ZHANG, Weiping
分类号 C23C14/04;H01L51/56 主分类号 C23C14/04
代理机构 代理人
主权项
地址