发明名称 METHOD FOR MANUFACTURING BLIND HOLE OF INSULATING SUBSTRATE FOR ELECTRONIC DEVICE
摘要 The present disclosure provides a method for manufacturing a blind hole of an insulating substrate for an electronic device. The method includes following steps. A patterned photoresist layer is formed over the insulating substrate. The patterned photoresist layer has an opening exposing a portion of the insulating substrate. A wet etching process is performed to remove the exposed insulating substrate to form a blind hole in the opening.
申请公布号 US2017062102(A1) 申请公布日期 2017.03.02
申请号 US201514972107 申请日期 2015.12.17
申请人 General Interface Solution Limited ;Interface Optoelectronics (ShenZhen) Co., Ltd. 发明人 CHANG Chun-Te;KUO Yu-Pi;LIU Chung-Wu;CHUANG Wei-Chung
分类号 H01B19/04;H01B3/08;C03C15/00 主分类号 H01B19/04
代理机构 代理人
主权项 1. A method for manufacturing a blind hole of an insulating substrate for an electronic device, comprising: forming a patterned photoresist layer over the insulating substrate, the patterned photoresist layer having an opening exposing a portion of the insulating substrate; and performing a wet etching process to remove the portion of the insulating substrate to form a blind hole in the opening.
地址 Miaoli County TW