ELECTRO-OPTICAL DEVICE, METHOD OF MANUFACTURING ELECTRO-OPTICAL DEVICE, ELECTRO-OPTICAL UNIT, AND ELECTRONIC APPARATUS

摘要

In an electro-optical device, light is incident on a mirror by penetrating a cover, and the light reflected by the mirror is emitted by penetrating the cover. Here, the cover includes a first light-transmitting plate and a second light-transmitting plate facing the first light-transmitting plate, and a gap which is open toward both sides in a first direction is provided between the first light-transmitting plate and the second light-transmitting plate due to a spacer.

主权项

1. An electro-optical device comprising:
an element substrate on which a mirror and a drive element which drives the mirror are provided on a first surface side; and a cover which is provided on the first surface side and disposed such that the mirror is located between the element substrate and the cover, wherein the cover includes a first light-transmitting plate having a light-transmitting property, a second light-transmitting plate having a light-transmitting property and disposed such that the first light-transmitting plate is located between the mirror and the second light-transmitting plate, and a spacer which is interposed between the first light-transmitting plate and the second light-transmitting plate and provided with a gap which is open toward both sides in a first direction intersecting a thickness direction in which the first light-transmitting plate and the second light-transmitting plate face each other, between the first light-transmitting plate and the second light-transmitting plate.