| 发明名称 |
SURFACE ACOUSTIC WAVE (SAW) RESONATOR |
| 摘要 |
A surface acoustic wave (SAW) resonator includes a piezoelectric layer disposed over a substrate, and a plurality of electrodes disposed over the first surface of the piezoelectric layer. A layer is disposed between the substrate and the piezoelectric layer. A surface of the layer has a smoothness sufficient to foster atomic bonding between layer and the piezoelectric layer. A plurality of features provided on a surface of the piezoelectric layer reflects acoustic waves and reduces the incidence of spurious modes in the piezoelectric layer. |
| 申请公布号 |
US2017063333(A1) |
申请公布日期 |
2017.03.02 |
| 申请号 |
US201514866394 |
申请日期 |
2015.09.25 |
| 申请人 |
Avago Technologies General IP (Singapore) Pte. Ltd. |
发明人 |
Gilbert Stephen Roy;Ruby Richard C. |
| 分类号 |
H03H9/64;H03H9/25 |
主分类号 |
H03H9/64 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A surface acoustic wave (SAW) resonator structure, comprising:
substrate having a first surface and a second surface; a piezoelectric layer disposed over the substrate, the piezoelectric layer having a first surface, and a second surface comprising a plurality of features; a plurality of electrodes disposed over the first surface of the piezoelectric layer, the plurality of electrodes configured to generate surface acoustic waves in the piezoelectric layer; and a layer disposed between the first surface of the substrate and the second surface of the piezoelectric layer, the second surface of the layer having a smoothness sufficient to foster atomic bonding between the second surface of the layer and the first surface of the substrate, wherein the plurality of features reflect acoustic waves and reduce the incidence of spurious modes in the piezoelectric layer. |
| 地址 |
Singapore SG |
