DETECTION DEVICE, IMPRINT APPARATUS, METHOD OF MANUFACTURING ARTICLE, ILLUMINATION OPTICAL SYSTEM, AND DETECTION METHOD

摘要

A detection device includes an illumination optical system configured to illuminate a first alignment mark for detecting a position of an object in a first direction and a second alignment mark for detecting a position of the object in a second direction that is different from the first direction and a detection optical system configured to detect light beams from the alignment marks. The illumination optical system includes an optical element disposed at a position optically conjugate to a surface to be illuminated, and the optical element includes a region configured to form an illumination light beam for illuminating a first portion of the surface to be illuminated with a first angular distribution and a region configured to form an illumination light beam for illuminating a second portion that is different from the first portion of the surface to be illuminated with a second angular distribution that is different from the first angular distribution. The detection optical system is configured to detect a light beam from the first alignment mark in the first portion illuminated with the first angular distribution and to detect a light beam from the second alignment mark in the second portion illuminated with the second angular distribution.