MICROELECTROMECHANICAL STRUCTURE WITH ENHANCED REJECTION OF ACCELERATION NOISE

摘要

An integrated MEMS structure includes a driving assembly anchored to a substrate and actuated with a driving movement. A pair of sensing masses suspended above the substrate and coupled to the driving assembly via elastic elements is fixed in the driving movement and performs a movement along a first direction of detection, in response to an external stress. A coupling assembly couples the pair of sensing masses mechanically to couple the vibration modes. The coupling assembly is formed by a rigid element, which connects the sensing masses and has a point of constraint in an intermediate position between the sensing masses, and elastic coupling elements for coupling the rigid element to the sensing masses to present a first stiffness to a movement in phase-opposition and a second stiffness, greater than the first, to a movement in phase, of the sensing masses along the direction of detection.

主权项

1. A device, comprising:
a substrate; an anchor attached to the substrate; a first pair of sensing masses coupled to the anchor; a second pair of sensing masses coupled to the anchor; and a third pair of sensing masses coupled to the second pair of masses, the first pair of sensing masses are separated from each other by the anchor and aligned with each other on a first axis and the second pair of sensing masses are separated from each other by the anchor and aligned with each other on a second axis that is transverse to the first axis.