PIVOT APPARATUS FOR A MICROMIRROR, AND ILLUMINATION APPARATUS HAVING A PIVOT APPARATUS FOR A MICROMIRROR

摘要

A pivot apparatus, in particular a pivot apparatus for a micromirror, a fixed base frame being connected, directly or indirectly via an intermediate frame, to a pivotable carrier element. Spring elements having flexural springs are respectively disposed between the base frame and carrier element, base frame and intermediate frame, and intermediate frame and carrier element. The use of flexural springs enables good thermal coupling between the individual components, and an increase in robustness. The pivot apparatus can be embodied in particular as a microelectromechanical system.

主权项

1. A pivot apparatus for a micromirror, comprising:
a carrier element that is couplable to the micromirror; and a first spring element that includes a flexural spring and that is coupled to the carrier element; and a base frame that is coupled to the first spring element.