| 发明名称 |
METHODS AND DEVICES FOR EXAMINING AN ELECTRICALLY CHARGED SPECIMEN SURFACE |
| 摘要 |
A method for examining a specimen surface with a probe of a scanning probe microscope, the specimen surface having an electrical potential distribution. The method includes (a) determining the electrical potential distribution of at least one first partial region of the specimen surface; and (b) modifying the electrical potential distribution in the at least one first partial region of the specimen surface and/or modifying an electrical potential of the probe of the scanning probe microscope before scanning at least one second partial region of the specimen surface. |
| 申请公布号 |
US2017062180(A1) |
申请公布日期 |
2017.03.02 |
| 申请号 |
US201615253795 |
申请日期 |
2016.08.31 |
| 申请人 |
Carl Zeiss SMT GmbH |
发明人 |
Budach Michael;Schnell Michael;Schindler Bernd;Boese Markus |
| 分类号 |
H01J37/28 |
主分类号 |
H01J37/28 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A method for examining a specimen surface with a probe of a scanning probe microscope, the specimen surface having an electrical potential distribution of an electrostatic charge, the method comprising the steps of:
a. determining the electrical potential distribution of the electrostatic charge of at least one first partial region of the specimen surface; and b. modifying the electrical potential distribution of the electrostatic charge in the at least one first partial region of the specimen surface and/or modifying an electrical potential of the probe of the scanning probe microscope before scanning at least one second partial region of the specimen surface. |
| 地址 |
Oberkochen DE |
