| 摘要 |
A MEMS device, having two flexible, permeable members which are manufactured to have sub-millimeter dimensions using MEMS fabrication procedures. The flexible, permeable members may form a reed switch, which closes an electrical connection in the presence of a magnetic field, and opens the connection otherwise. The MEMS reed switch device may be made using a three-wafer architecture of a lid wafer, a device wafer, and a lower, supporting wafer. |
| 主权项 |
1. A microfabricated MEMS reed switch device comprising:
a first flexible, magnetically permeable member formed on a surface of a substrate; at least one additional, magnetically permeable member also formed on the same substrate and disposed in a position adjacent the first flexible, magnetically permeable member; and at least two electrical contacts that, together with the flexible, magnetically permeable members form a portion of an electric circuit. |
