X-RAY ANALYSIS DEVICE

摘要

An X-ray analysis device includes an electron gun, an X-ray optical member, a first detection unit and a second detection unit, and a distance changing mechanism. The X-ray optical member guides characteristic X-rays emitted from a sample to at least any one of the first detection unit or the second detection unit. The first detection unit is formed such that energy resolution is given relative priority over counting efficiency in contrast to the second detection unit. The second detection unit is formed such that counting efficiency is given relative priority over energy resolution in contrast to the first detection unit. The distance changing mechanism changes the distance between each of the first detection unit and the second detection unit and the X-ray optical member in an axial direction of an optical axis of the X-ray optical member.

主权项

1. An X-ray analysis device comprising:
an excitation source which excites a sample to be analyzed to emit characteristic X-rays; a plurality of detection units which detect the characteristic X-rays emitted from the sample; an optical member which guides the characteristic X-rays emitted from the sample to at least any one of the plurality of detection units; and a distance changing mechanism which changes a distance between each of the plurality of detection units and the optical member in an axial direction of an optical axis of the optical member, wherein the plurality of detection units include at least a first detection unit and a second detection unit having different detection characteristics, the first detection unit is formed such that energy resolution is given relative priority over counting efficiency in contrast to the second detection unit, and the second detection unit is formed such that counting efficiency is given relative priority over energy resolution in contrast to the first detection unit.