INTEGRATED CIRCUIT INCLUDING AN ACTIVE DEVICE FOR CONFINEMENT OF A LIGHT FLUX

摘要

An integrated circuit includes an active device for confinement of a light flux that is formed in a semiconducting substrate. A confinement rib is separated from two doped zones by two trenches. Each doped zone includes a contacting zone on an upper face. Each trench widens from a bottom wall towards the upper face of the corresponding doped zone. The widening trenches present a sidewall having a tiered profile between the trench and the doped zone. An opposite sidewall presents a straight profile.

主权项

1. An integrated circuit, comprising:
a semiconducting substrate including an active device for confinement of a light flux including a confinement rib separated from two doped zones by two trenches, each doped zone including a contacting zone on an upper face of the doped zone, wherein each trench widens from a bottom wall towards the upper face of the corresponding doped zone.