发明名称 METHOD FOR MANUFACTURING ANTI-REFLECTIVE SURFACE USING PLASMA ETCHING, AND SUBSTRATE HAVING ANTI-REFLECTIVE SURFACE FORMED THEREON
摘要 The present invention relates to a method for manufacturing an anti-reflective surface, which controls an anti-reflective structure layer, which is formed through repeated controls of plasma dry etching and inorganic deposition, with various structures, and can thus enhance durability and secure excellent light transmittance and anti-reflection effect while imparting functionalities such as easy cleaning, contamination resistance, scratch resistance, etc.; and to a substrate having an anti-reflective surface formed thereon.
申请公布号 WO2017034262(A1) 申请公布日期 2017.03.02
申请号 WO2016KR09245 申请日期 2016.08.22
申请人 CEKO CO., LTD.;KOREA INSTITUTE OF MACHINERY & MATERIALS 发明人 KIM, Hyun Joong;KIM, Hong Chul;KIM, Joung Rae;CHOI, Byeong Gyeong;WANG, Hong Rae;KWON, Ah Hyun;SHIN, Dong Hyun;LEE, Sung Do;RHA, Jong Joo;KWON, Jung Dae
分类号 H01L21/3065;H01L21/56;H01L31/0216 主分类号 H01L21/3065
代理机构 代理人
主权项
地址