发明名称 |
METHOD FOR MANUFACTURING ANTI-REFLECTIVE SURFACE USING PLASMA ETCHING, AND SUBSTRATE HAVING ANTI-REFLECTIVE SURFACE FORMED THEREON |
摘要 |
The present invention relates to a method for manufacturing an anti-reflective surface, which controls an anti-reflective structure layer, which is formed through repeated controls of plasma dry etching and inorganic deposition, with various structures, and can thus enhance durability and secure excellent light transmittance and anti-reflection effect while imparting functionalities such as easy cleaning, contamination resistance, scratch resistance, etc.; and to a substrate having an anti-reflective surface formed thereon. |
申请公布号 |
WO2017034262(A1) |
申请公布日期 |
2017.03.02 |
申请号 |
WO2016KR09245 |
申请日期 |
2016.08.22 |
申请人 |
CEKO CO., LTD.;KOREA INSTITUTE OF MACHINERY & MATERIALS |
发明人 |
KIM, Hyun Joong;KIM, Hong Chul;KIM, Joung Rae;CHOI, Byeong Gyeong;WANG, Hong Rae;KWON, Ah Hyun;SHIN, Dong Hyun;LEE, Sung Do;RHA, Jong Joo;KWON, Jung Dae |
分类号 |
H01L21/3065;H01L21/56;H01L31/0216 |
主分类号 |
H01L21/3065 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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