DEVICE USING A PIEZOELECTRIC ELEMENT AND METHOD FOR MANUFACTURING THE SAME

摘要

An inkjet printing head 1 includes an actuator substrate 2 having pressure chambers (cavities) 7, a movable film formation layer 10 including movable films 10A disposed above the pressure chambers 7 and defining top surface portions of the pressure chambers 7, and piezoelectric elements 9 formed above the movable films 10A. Each piezoelectric element 9 includes a lower electrode 11 formed above a movable film 10A, a piezoelectric film 12 formed above the lower electrode 11, and an upper electrode 13 formed above the piezoelectric film 12. The piezoelectric film 12 includes an active portion 12A with an upper surface in contact with a lower surface of an upper electrode 13 and an inactive portion 12B led out in a direction along a front surface of the movable film formation layer 10 from an entire periphery of a side portion of the active portion 12A and having a thickness thinner than that of the active portion 12A.

主权项

1. A device using a piezoelectric element comprising:
a substrate having a cavity; a movable film formation layer including a movable film disposed above the cavity and defining a top surface portion of the cavity; and a piezoelectric element formed above the movable film, wherein the piezoelectric element includes a lower electrode formed above the movable film, a piezoelectric film formed above the lower electrode, and an upper electrode formed above the piezoelectric film, and the piezoelectric film includes an active portion with an upper surface in contact with a lower surface of the upper electrode and an inactive portion led out in a direction along a front surface of the movable film formation layer from an entire periphery of a side portion of the active portion and having a thickness thinner than that of the active portion.