发明名称 METHODS OF FORMING MAGNETIC DEVICES WITH VARIABLE OVERCOATS
摘要 Methods that include depositing a first layer over the entire surface of a structure, the structure having a magnetic reader and a magnetic writer, wherein the magnetic reader and the magnetic writer are positioned adjacent to each other on a substrate and the magnetic writer includes a near field transducer (NFT); depositing a second layer over the entire surface of the first layer; depositing a photoresist material layer over the entire surface of the second layer, the photoresist material layer having a bottom surface in contact with the second layer and an opposing top surface; exposing the photoresist material layer to radiation through the bottom surface of the photoresist material layer via the NFT to form a first exposed region; and exposing the photoresist material layer to radiation through the top surface of the photoresist material layer to form a second exposed region.
申请公布号 US2017061994(A1) 申请公布日期 2017.03.02
申请号 US201615248682 申请日期 2016.08.26
申请人 SEAGATE TECHNOLOGY LLC 发明人 Stephan Joseph Michael;Cole Douglas H.;Buettner Daniel Richard
分类号 G11B5/31 主分类号 G11B5/31
代理机构 代理人
主权项 1. A method comprising: depositing a first layer over the entire surface of a structure, the structure comprising a magnetic reader and a magnetic writer, wherein the magnetic reader and the magnetic writer are positioned adjacent to each other on a substrate and the magnetic writer comprises a near field transducer (NFT); depositing a second layer over the entire surface of the first layer; depositing a photoresist material layer over the entire surface of the second layer, the photoresist material layer having a bottom surface in contact with the second layer and an opposing top surface; exposing the photoresist material layer to radiation through the bottom surface of the photoresist material layer via the NFT to form a first exposed region; and exposing the photoresist material layer to radiation through the top surface of the photoresist material layer to form a second exposed region.
地址 Cupertino CA US