| 发明名称 |
Removing Device for Removing Evaporated Material and Evaporation Device |
| 摘要 |
The present disclosure provides a device for removing an evaporated material and an evaporation device. The removing device includes a shutter arranged above an evaporation source, a movement member configured to control the shutter to move in both a horizontal direction and a vertical direction relative to the evaporation source, a motor arranged on the shutter, and a removing member connected to, and driven by, the motor, and configured to remove the evaporated material deposited at and blocking an outlet of the evaporation source. |
| 申请公布号 |
US2017058395(A1) |
申请公布日期 |
2017.03.02 |
| 申请号 |
US201615094307 |
申请日期 |
2016.04.08 |
| 申请人 |
BOE TECHNOLOGY GROUP CO., LTD. |
发明人 |
ZHANG Peng |
| 分类号 |
C23C14/22;H01L51/00;H01L51/56;H01L21/67;C23C14/54;B08B1/00 |
主分类号 |
C23C14/22 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A removing device for removing an evaporated material, comprising:
a shutter arranged above an evaporation source; a movement member configured to control the shutter to move in both a horizontal direction and a vertical direction relative to the evaporation source; a motor arranged on the shutter; and a removing member connected to, and driven by, the motor, and configured to remove the evaporated material deposited at and blocking an outlet of the evaporation source. |
| 地址 |
Beijing CN |
