发明名称 PURGE DEVICE, PURGE STOCKER, AND PURGE METHOD
摘要 [Problem] To provide a purge device capable of suitably performing purging in accordance with the type of a container. [Solution] A purge device (4A) is provided with: a type detection unit (41) that detects the type of a container (F) to be purged; and a purge control unit (42) that determines purge conditions with respect to the container on the basis of detection results obtained from the type detection unit.
申请公布号 WO2017033546(A1) 申请公布日期 2017.03.02
申请号 WO2016JP68267 申请日期 2016.06.20
申请人 MURATA MACHINERY, LTD. 发明人 MURATA, Masanao;YAMAJI, Takashi
分类号 H01L21/673;B65G1/00 主分类号 H01L21/673
代理机构 代理人
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