发明名称 |
PURGE DEVICE, PURGE STOCKER, AND PURGE METHOD |
摘要 |
[Problem] To provide a purge device capable of suitably performing purging in accordance with the type of a container. [Solution] A purge device (4A) is provided with: a type detection unit (41) that detects the type of a container (F) to be purged; and a purge control unit (42) that determines purge conditions with respect to the container on the basis of detection results obtained from the type detection unit. |
申请公布号 |
WO2017033546(A1) |
申请公布日期 |
2017.03.02 |
申请号 |
WO2016JP68267 |
申请日期 |
2016.06.20 |
申请人 |
MURATA MACHINERY, LTD. |
发明人 |
MURATA, Masanao;YAMAJI, Takashi |
分类号 |
H01L21/673;B65G1/00 |
主分类号 |
H01L21/673 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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