发明名称 エンコーダ及び駆動装置
摘要 An encoder includes a scale unit having a substrate configured of a metal material and in which a pattern is formed on a first surface of the substrate and a passive state member is formed on a second surface different from the first surface in the substrate, and a detection unit that is configured to move relative to the scale unit and detects the pattern.
申请公布号 JP6086070(B2) 申请公布日期 2017.03.01
申请号 JP20130551797 申请日期 2012.12.27
申请人 株式会社ニコン 发明人 引地 新太郎;杉山 英明
分类号 G01D5/347 主分类号 G01D5/347
代理机构 代理人
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