发明名称 半導体装置
摘要 In a semiconductor device including an oxide semiconductor layer, a conductive layer is formed in contact with a lower portion of the oxide semiconductor layer and treatment for adding an impurity is performed, so that a channel formation region and a pair of low-resistance regions between which the channel formation region is sandwiched are formed in the oxide semiconductor layer in a self-aligned manner. Wiring layers electrically connected to the conductive layer and the low-resistance regions are provided in openings of an insulating layer.
申请公布号 JP6087548(B2) 申请公布日期 2017.03.01
申请号 JP20120199504 申请日期 2012.09.11
申请人 株式会社半導体エネルギー研究所 发明人 磯部 敦生;佐々木 俊成
分类号 H01L29/786;C23C14/08;H01L21/28;H01L21/336;H01L21/768;H01L21/8234;H01L21/8242;H01L27/08;H01L27/088;H01L27/10;H01L27/105;H01L27/108;H01L27/115;H01L29/41;H01L29/788;H01L29/792 主分类号 H01L29/786
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