发明名称 |
MASS FLOW CONTROLLER AND METHOD OF OPERATING THE SAME |
摘要 |
One embodiment of the present invention involves a thermal sensor and a method of using the same. One thermal sensor is adapted to output a signal which is unaffected by external longitudinal and orthogonal thermal gradients. In one embodiment, the mass flow controller thermal sensor comprises a capillary tube having an upstream tube portion, a tube bend portion, and a downstream tube portion, the downstream portion being substantially parallel to the upstream portion. A distance between the upstream tube portion and the downstream tube portion in one embodiment is no greater than half the upstream portion and downstream portion lengths, a first pair of thermal sensing elements are coupled to the upstream tube portion and a second pair of thermal sensing elements are coupled to the downstream tube portion. |
申请公布号 |
EP2338036(B1) |
申请公布日期 |
2017.03.01 |
申请号 |
EP20090821089 |
申请日期 |
2009.10.13 |
申请人 |
Hitachi Metals, Ltd. |
发明人 |
SMIRNOV, Alexei;MCDONALD, Mike;MAUCK, Justin |
分类号 |
G01F5/00;G01F1/684;G01F1/696;G05D7/06 |
主分类号 |
G01F5/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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