| 发明名称 |
LASER DICING USING AN ADHESIVE SHEET |
| 摘要 |
An object of the present invention is to provide a laser dicing sheet which is capable of preventing cutting of dicing sheet by laser beam, damage of the chuck table and fusion of the dicing sheet to the chuck table. A laser dicing sheet according to the present invention comprising a base material comprising a polyurethane acrylate; and an adhesive layer formed on one surface thereof. |
| 申请公布号 |
EP2091073(B1) |
申请公布日期 |
2017.03.01 |
| 申请号 |
EP20070832745 |
申请日期 |
2007.11.29 |
| 申请人 |
Lintec Corporation |
发明人 |
WAKAYAMA, Yoji;SATO, Yosuke;TAYA, Naoki |
| 分类号 |
H01L21/301;B23K26/18;B23K26/40;B23K103/00;C09J7/02;C09J201/00;H01L21/683;H01L21/78 |
主分类号 |
H01L21/301 |
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| 主权项 |
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