エッチング液およびエッチング液のキット、これをもちいたエッチング方法および半導体基板製品の製造方法

摘要

There is provided an etching solution of a semiconductor substrate that includes a first layer containing germanium (Ge) and a second layer containing a specific metal element other than germanium (Ge), the etching solution selectively removing the second layer and including an organic alkali compound.