| 摘要 |
An X-ray spectrometric detection device 1A includes a dispersive crystal 20 and a two-dimensional X-ray detector 30, spectrally resolves characteristic X-rays 2 emitted from a micro analysis spot P having a diameter of 100 µm or less on a surface of a sample 10 irradiated with X-rays or an electron beam, and detects the resolved X-rays by wavelength. The dispersive crystal 20 has a flat diffractive reflection surface 20a for receiving the characteristic X-rays 2 emitted from the micro analysis spot P and diffracts and reflects a wavelength component corresponding to an incident angle to the diffractive reflection surface 20a in wavelength components included in the characteristic X-rays 2, so as to spectrally resolve the characteristic X-rays 2 by wavelength. The detector 30 has a light-receiving surface 30a for receiving the characteristic X-rays 2 diffracted and reflected by the dispersive crystal 20, and generates data concerning an incident position and intensity of the characteristic X-rays 2 incident on the light-receiving surface 30a. |
