发明名称 LORENTZ ACTUATOR, OBJECT POSITIONING SYSTEM, LITHOGRAPHIC APPARATUS AND LORENTZ ACTUATOR OPERATING METHOD
摘要 The invention relates to a Lorentz actuator comprising: - a magnet arrangement; - a coil arrangement; - a current controller for supplying a current to the coil arrangement; wherein the magnet and coil arrangement are moveable relative to each other in a main direction, wherein the coil arrangement comprises a first and second coil portion that are separately operable by the current controller, such that when the same current is supplied to the first coil portion as is supplied to the second coil portion, Lorentz forces generated in the main direction by the first and second coil portion are also the same, and wherein the current controller is configured to supply a current to the first and second coil portions with a phase difference in order to compensate for parasitic reluctance and/or Lorentz forces in an auxiliary direction perpendicular to the main direction.
申请公布号 NL2017246(A) 申请公布日期 2017.03.01
申请号 NL20162017246 申请日期 2016.07.28
申请人 ASML NETHERLANDS B.V. 发明人 OLOF MARTINUS JOSEPHUS FISCHER;FIDELUS ADRIANUS BOON
分类号 G03F7/20 主分类号 G03F7/20
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