| 摘要 |
PROBLEM TO BE SOLVED: To provide a movable body apparatus with improved controllability.SOLUTION: A substrate stage apparatus 20 has: a follower table 28 movable in a predetermined long stroke along an X-axis direction; a Y beam guide 24a extending in a Y-axis direction and movable together with the follower table 28 along the X-axis direction; a fine stage 50 provided on the Y beam guide 24a in a state in which it is freely-movable with respect to the Y beam guide 24a in a direction along an X-Y plane; and a driving unit comprising an X/Y-axis 2DOF motor with its stator 36a provided on the follower table 28, and driving the fine stage 50 in a predetermined long stroke along the Y-axis direction on the Y beam guide 24a by exerting a thrust force along the Y-axis direction to the fine stage 50, as well as driving the fine stage 50 in a minute stroke along the X-axis direction on the Y beam guide 24a by exerting a thrust force along the X-axis direction to the fine stage 50. |
