发明名称 無害化処理装置
摘要 PROBLEM TO BE SOLVED: To provide a detoxification treatment apparatus which decomposes and eliminates a harmful gas component in a processed gas with high efficiency and achieves downsizing, and to provide a detoxification treatment method.SOLUTION: A detoxification treatment apparatus 1 includes: a solution storage tank 2 which stores a solution in which a harmful gas component in a processed gas dissolves; a bubble formation part 3 which introduces bubbles P of the processed gas and the solution into the solution in the solution storage tank with the bubbles P and the solution mixed; an electromagnetic field application part 4 which is provided in the solution in the solution storage tank 2 and makes the bubbles P into plasma; micro wave supply means 5 which supplies micro waves to the electromagnetic field application part 4; and a gas exhaust port 6 which is provided at the upper part side of the solution storage tank 2 and exhausts a gas component, from which a harmful component is eliminated, to the outer side of the solution storage tank 2.
申请公布号 JP6086229(B2) 申请公布日期 2017.03.01
申请号 JP20130069031 申请日期 2013.03.28
申请人 大陽日酸株式会社 发明人 鈴木 克昌
分类号 B01D53/70;B01D53/18;B01J19/08;H01L21/205;H01L21/3065;H01L21/31;H05H1/24 主分类号 B01D53/70
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