| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate inspection device and a substrate delivery method which allow for delivery of a substrate while holding the substrate firmly.SOLUTION: A wafer inspection device 1 includes a wafer mounting table 4a having a plurality of vacuum suction pads 61 for sucking a wafer W, a back arm 10 having a plurality of vacuum suction pads 71 for sucking the wafer W, and a suction auxiliary member 11 having a suction pad 81 for generating a negative pressure between the wafer W and itself, and delivering the wafer W from the mounting table 4a to the back arm 10. Upper surface of the suction pad 81 of a suction auxiliary member 11 is movable to two positions, i.e., a retreat position lower than the upper surface of the vacuum suction pad 61, and a correction position higher than the retreat position but lower than the upper surface of the vacuum suction pad 61. |
